|
|||||
|
|
| 高精度微孔测量探头 | |
| 引用本文： | 李瑞君,许鹏,唐帅涛,范光照,程真英.高精度微孔测量探头[J].计量学报,2018,39(5):598-604. |
| 作者姓名： | 李瑞君 许鹏 唐帅涛 范光照 程真英 |
| 作者单位： | 1.合肥工业大学 仪器科学与光电工程学院, 安徽 合肥 230009 2.台湾大学 机械工程学系, 台北 10617 |
| 基金项目： | 国家自然科学基金（51675157） |
| 摘 要： | 对高精度探头的研究和发展进行了叙述,介绍了所研制的一款由一个二维角度传感器、一个弹性机构和一个自制的微球形钨探针组成的微孔测量探头。对探头的刚度和重复性分别进行了仿真验证和实验测试,结果表明:该探头在三维方向上的刚度均小于0.4 mN/μm,重复性均优于20 nm（k=2）。最后利用该探头对一个直径为420 μm的微孔进行了实际测量,测量结果验证了该探头的实用性。 |
| 关 键 词： | 计量学 探头 微孔 刚度 重复性 |
| 收稿时间： | 2017-11-13 |
High-precision Probe for Measuring Micro-holes |
|
| LI Rui-jun,XU Peng,TANG Shuai-tao,FAN Kuang-chao,CHENG Zhen-ying.High-precision Probe for Measuring Micro-holes[J].Acta Metrologica Sinica,2018,39(5):598-604. | |
| Authors: | LI Rui-jun XU Peng TANG Shuai-tao FAN Kuang-chao CHENG Zhen-ying |
| Affiliation: | 1. School of Instrument Science and Opto-electric Engineering, Hefei University of Technology, Hefei, Anhui 230009, China 2. Department of Mechanical Engineering, Taiwan University, Taipei 10617, China |
| Abstract: | The research and development of high-precision probes are described. A micro-hole measuring probe composed of a two-dimensional angle sensor, an elastic mechanism, and a homemade micro-spherical tungsten stylus is introduced. The stiffness and repeatability of the probe were verified by simulation and experiments respectively. The results show that the stiffness of the probe in three-dimensional directions is less than 0.4 mN/μm, the repeatability is better than 20 nm (k = 2). Finally, a practical measurement for a micro-hole with a diameter of approximately 420 μm was performed using the probe. The measurement results verified the practicality of the probe. |
| Keywords: | metrology probe micro-hole stiffness repeatbility |
| 本文献已被 CNKI 等数据库收录！ | |
| 点击此处可从《计量学报》浏览原始摘要信息 | |
| 点击此处可从《计量学报》下载全文 | |