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| 基于电化学腐蚀法的钨探针制备装置研究 | |
| 引用本文： | 徐靖涛,高思田,黄鹭,李琪,李东升,汪雅丽. 基于电化学腐蚀法的钨探针制备装置研究[J]. 计量学报, 2018, 39(3): 294-298. DOI: 10.3969/j.issn.1000-1158.2018.03.02 |
| 作者姓名： | 徐靖涛 高思田 黄鹭 李琪 李东升 汪雅丽 |
| 作者单位： | 1.中国计量大学计量测试工程学院, 浙江杭州 310018 2.中国计量科学研究院, 北京 100029 3.浙江理工大学机械与自动控制学院, 浙江杭州 310027 |
| 基金项目： | 国家重点研发计划（2016YFF0200602, 2016YFF0200404） |
| 摘 要： | 基于电化学腐蚀法制备钨探针的原理,设计了一套钨探针制备装置,并对钨探针制备参数进行了研究。装置的实验部分用于调整探针与电解槽的相对位置和运动参数,控制部分用于监测、控制并记录电化学反应的状态。与传统腐蚀探针相比,该装置通过控制电路控制探针腐蚀过程中运动参数,获得了形状可控的大长径比探针;同时通过精确控制腐蚀反应时间,可制备针尖曲率半径范围为5~20 nm的探针。 |
| 关 键 词： | 计量学 钨探针 电化学腐蚀 长径比 曲率半径 |
| 收稿时间： | 2017-05-26 |
Research on Tungsten Probe Fabrication Device Based on the Electrochemical Etching Method |
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| XU Jing-tao,GAO Si-tian,HUANG Lu,LI Qi,LI Dong-sheng,WANG Ya-li. Research on Tungsten Probe Fabrication Device Based on the Electrochemical Etching Method[J]. Acta Metrologica Sinica, 2018, 39(3): 294-298. DOI: 10.3969/j.issn.1000-1158.2018.03.02 | |
| Authors: | XU Jing-tao GAO Si-tian HUANG Lu LI Qi LI Dong-sheng WANG Ya-li |
| Affiliation: | 1. Collage of Metrology & Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China 2. National Institute of Metrology, Beijing 100029, China 3. Collage of Mechanical Engineering and Automation, Zhejiang Sci-Tech University, Hangzhou, Zhejiang 310027, China |
| Abstract: | A tungsten probe fabrication device is proposed based on electrochemical etching method and the parameter of fabricating tungsten probe is researched.The experimental part can be used to adjust the relative position and motion parameters of the probe and the electrolyzer.The control part can be used to control and record the state of electrochemical etching.Compared with traditional fabrication device, the present device ensured to fabricate large length-to-width ratio tip by controlling the motion of tungsten probe, meanwhile, the radius of tips can be precisely controlled within 5 ~ 20 nm by controlling the etching time. |
| Keywords: | metrology tungsten probe tip electrochemical etching ratio of length-diameter curvature radius |
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