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| 基于共振光隧穿效应的角加速度传感器设计 | |
| 引用本文： | 李慧明,邹璐,菅傲群,王雷阳,段倩倩,桑胜波.基于共振光隧穿效应的角加速度传感器设计[J].计量学报,2018,39(5):684-687. |
| 作者姓名： | 李慧明 邹璐 菅傲群 王雷阳 段倩倩 桑胜波 |
| 作者单位： | 1. 太原理工大学 微纳系统研究中心, 山西 太原 030024 2. 太原理工大学 新型传感器与智能控制教育部和山西省重点实验室, 山西 太原 030024 |
| 基金项目： | 国家自然科学基金(61501316, 61471255, 61474079, 51505324); 山西省归国留学基金(2015-047); 山西省自然科学基金(2013011016-1); 山西省人才专项(优秀人才科技创新)项目(201605D211027) |
| 摘 要： | 阐述了一种基于共振光隧穿效应的角加速度传感器的设计方法,分析了其传感特性,并以共振光隧穿理论为基础,利用Mathematica软件进行了仿真分析。该加速度传感器的品质因数可以达到1.96×108,远高于经典F-P腔的品质因数8.183×104。灵敏度可以达到0.1°/nm, |
| 关 键 词： | 计量学 角加速度传感器 共振光隧穿效应 灵敏度 品质因数 |
| 收稿时间： | 2017-05-08 |
Design of Angular Accelerometer Based on Resonant Optical Tunneling Effect |
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| LI Hui-ming,ZOU Lu,JIAN Ao-qun,WANG Lei-yang,DUAN Qian-qian,SANG Sheng-bo.Design of Angular Accelerometer Based on Resonant Optical Tunneling Effect[J].Acta Metrologica Sinica,2018,39(5):684-687. | |
| Authors: | LI Hui-ming ZOU Lu JIAN Ao-qun WANG Lei-yang DUAN Qian-qian SANG Sheng-bo |
| Affiliation: | 1. Micro-nano System Research Center, Taiyuan University of Technology, Taiyuan, Shanxi 030024, China 2. Key Laboratory of Advanced Transducers and Intelligent Control System, Shanxi Province and Ministry of Education, Taiyuan, Shanxi 030024, China) |
| Abstract: | Resonant optical tunneling effect (ROTE) is used to describe a design method of angular acceleration sensor and its sensing characteristics are analyzed. Finally, through theoretical analysis and simulation calculation using Mathematica based on the resonant optical tunneling effect,the quality factor and sensitivityof the accelerometer reach up to 1.96×108 and 0.1 °/nm, respectively, which is higher than that of the classic F-P cavity. |
| Keywords: | metrology angular accelerometer resonant optical tunneling effect sensitivity quality factor |
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