一种无触点快速测量表面粗糙度的方法

提出一种使用激光束快速测量表面粗糙度的无触点光学方法。一束照射在样品表面的激光束随着表面粗糙度的增大反射光的密度分布将被扩展,可用PCD测出从铝制样品表面反射光的密度分布。被反射光的密度曲线可通过高斯函数近似地求出。密度分布曲线的宽度由高斯曲线系数的标准差计算出来,此标准差近似等于密度曲线的高斯函数的标准差,密度曲线的中线平均粗糙度随着高斯曲线系数的增加而增加。粗糙度Ra在0.1～0.5μm的范围内,可利用实验公式Ra=0.088GCP+0.032通过测量GCP得到。

A new method for noncontact rapid measurement of surface roughness

An optical detection technique for rapid measurement of surface roughness by using a laser beam is proposed.When a laser beam illuminate on the surface of a aluminum specimen,the space distribution of the reflected light intensity will be the function of the roughness of the surface of the specimen.And the intensity distribution can be measured with a plasma coupled device (PCD) and approximately expressed with Gaussian function.The broadness of the intensity distribution curve can be evaluated with standard deviation called Gaussian curve parameter (GCP).We find a experimental equation R_a=0.088GCP+0.032 to show the relationship between center line average roughness R_a and GCP in range of 0.1～0.5μm.