新型大扫描范围原子力显微镜的研究

研制了一种大扫描范围原子力显微镜(AFM)。设计了新的扫描驱动电路,使单幅图像的扫描范围大幅度提高;用步进电机和扫描器配合扫描,得到序列图像,序列图像拼接后获得大范围样品图像。实验结果表明,采用这一方法,在±150V 的电压驱动下,AFM 的扫描范围可增大到10 ìm?1 mm 的量级,同时保持 1 nm 量级的测试分辨力。

Study on a novel atomic force microscope with large scanning range

A novel Atomic Force Microscope (AFM) with large scanning range is developed. New scanning and driving circuits are designed and this makes its scanning range for single image being improved in large scale. Its scanning for samples are carried out by the scanner together with step motor, thus a series of sample images can be obtained. Sample image with large size can be obtained after the sequential images being spliced. The experimental results show that with this method the scanning range of AFM can be expanded from 10 micrometers to 1 millimeter under /-150V driving voltage and at the same time 1 nanometer level testing resolution can be maintained.