Detection of the Angular Distribution of the Signal Electrons in VLESEM |
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Authors: | Miroslav Horáček |
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Affiliation: | (1) Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská, 147, CZ 612 64-Brno, Czech Republic |
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Abstract: | The topic of this work is the study of direct detection of electrons by Charge-Coupled-Devices (CCD). The aim is to design a detector for the angle and energy-selective detection of signal electrons in very low energy scanning electron microscopy (VLESEM), using an electron-bombarded CCD sensor (EBCCD). We concentrate upon two problems—the design of appropriate electronics and determination of an appropriate energy of the signal electrons for the CCD sensor. |
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Keywords: | Very low energy scanning electron microscopy angular distribution immersion objective lens cathode lens electron bombarded CCD sensor |
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