改进型Henke超软X光源的研究

本文介绍了改进型Henke超软X光源的结构特点及电子光学特性。新研制的改进型Henke X光源在原型基础上作了许多改进。首次采用了双阴极四焦线的结构。通过四条焦线的合理分布,有效地改善了辐射强度的空间分布,使原Henke型软X光源的驼峰形辐射强度分布变平坦了。同时,在改进的Henke源中采用了新型六硼化镧(LaB₆)高效阴极取代了原来的钨阴极,从而降低了灯丝功率,提高了阴极发射效率。同时本文还推导了当电子垂直入射靶面时的辐射强度最大值所对应之靶电压的计算公式:U_0m=3.77×10⁵(μ/ρ)^-1/2。利用该公式计算了Al-k_α、Cu-l_α1α2、B-k_α以及Be-k_α等特征谱线辐射强度的峰值靶压,计算结果与Henke等学者发表的实验结果完全符合。

Improved Henke Ultra-soft X-ray Source

In this paper the construction characteristic and the electron-optical character of the improved Henke ultrasoft X-ray source are presented. Many improvements on the basis of the Henke source have been done in the new improved one. For the first time the double cathodes and four focus lines stracture are adopted. The spatial distrubution of radiative intensity is effectively improved and flattened by the rational allocation of four focus lines. A new cathode (LaB₆)takes the place of tungsten filement, which reduce input power and raises cathode emiting efficiency. In addition the target voltage formula of radiation intensity maximum is derived for the normal incidence of the electron beam. The characteristic line spectra of Alk_α, Cu-l_α1α2, B-k_α and Be-k_α are calculated by use of this formula. The calculation results accord with the Henke's measurment results.