Simulation of a microprofile and electric field distribution in MIM structures |
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Authors: | T. I. Danilina P. E. Troyan |
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Affiliation: | 1.Tomsk State University of Control Systems and Radio Electronics,Tomsk,Russia |
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Abstract: | Simulation of etching of a microtip’s lower electrode and deposition of a dielectric film has shown that the film undergoes a strong thinning at lateral surfaces and at the microtip’s bases. It is demonstrated that, at a microtip density of 5 × 108 cm−2, the electric field’s strength at the base of the tip is 3.5 times that at its apex, which gives rise to additional emission centers. |
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