| 应用AFM研究单晶硅、锗的超精密车削表面微观形貌 |
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| 引用本文： | 韩红玉,董申,赵奕. 应用AFM研究单晶硅、锗的超精密车削表面微观形貌[J]. 工具技术, 2000, 34(2): 22-25 |
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| 作者姓名： | 韩红玉 董申 赵奕 |
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| 作者单位： | 哈尔滨工业大学精密工程研究所,150001 |
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| 摘 要： | 单晶硅、锗的超精密车削表面存在明暗相间的分布特征。本文主要对该现象的产生原因进行了研究,认为车削过程中垂直解理面的切削分力的连续变化是产生这种分布特征的主要因素,用AFM对加工表面微观形貌的检测结果充分地证明了该观点的正确性
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| 关 键 词： | 超精密车削 单晶硅 单晶锗 AFM 表面形貌 |
Study on the Ultraprecision Turning Surface Microtopo-graphy of Single Crystal Silicon and Germanium |
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| Han Hongyu et al. Study on the Ultraprecision Turning Surface Microtopo-graphy of Single Crystal Silicon and Germanium[J]. Tool Engineering(The Magazine for Cutting & Measuring Engineering), 2000, 34(2): 22-25 |
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| Authors: | Han Hongyu et al |
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| Affiliation: | Han Hongyu et al |
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| Abstract: | The diamond turning surface of single crystal silicon and germanium appears distribution feature alternate with brightness and darkness. The reason of this phenomenon is studied. Continuous changes of cutting component force perpendicular to cleavage plane are found to be main causes of this phenomenon. The measurement result of machined surface microtopography by AFM is shown to be a good agreement with this viewpoint. |
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| Keywords: | Diamond turning Single crystal silicon Single crystal germanium AFM Surface microtopograghy |
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