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A study on surface roughness in ion-beam machining
Authors:T. Shima  N. Inoue
Abstract:This paper presents results on the influence of various machining conditions, namely machining time, (argon) ion energy, ion current density and beam angle, on surface roughness and machining depth for a high chromium — high carbon steel (SKD-1). The roughness characteristics are discussed from the measurement of surface asperities and the analysis of chromium density. In addition, as a method to obtain good surface roughness, the floating method which applies a positive charge to the workpiece, is tested.
Keywords:ion sputtering   ion-beam machining   ion milling   surface roughness   SKD-1
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