Some measurement results for frequency-dependent inductance of ICinterconnects on a lossy silicon substrate |
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| Authors: | De Roest D Ymeri H Vandenberghe S Stucchi M Schreurs D Maex K Nauwelaers B |
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| Affiliation: | Interuniv. Microelectron. Center (IMEC), Leuven ; |
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| Abstract: | Frequency dependent measurements of scattering (S) parameters using a vector network analyzer (VNA) have been performed on IC interconnects on a lossy silicon substrate. The multiline calibration method has been used to perform the de-embedding of the line parameters, from which the line inductance is extracted. A highly accurate closed-form approximation for frequency-dependent impedance per unit length of a lossy silicon substrate for IC interconnects has been used to compare with the measurements performed |
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