波长调谐随机移相算法的研究

波长移相干涉仪可用于大口径光学元件的测试。其移相量需经过标定方可采用定步长移相算法计算相位分布。在长腔长测试条件下,由于激光器的波长调谐控制电源的精度有限,以及环境振动、气流扰动等的影响,采用定步长移相算法求解相位分布的精度不高。在随机移相算法的基础上,提出了波长调谐随机移相算法,并将其应用于大口径波长移相干涉仪中。在对该算法进行模拟仿真,验证了算法的可行性及精度后,进行了实验研究。实验结果表明,在波长移相干涉仪中运用该方法,可以很好地解决长腔长测试条件下的相位计算问题,且与被测件的理想相位比较,精度较高。

Research on the Randomly Phase Shifting Algorithm with Wavelength Tuning

The wavelength tuning interferometer is applied to test large optical components. In order to calculate the phases using the algorithms with certain phase steps, the steps should be calibrated. When testing is done at long cavity lengths, the calculating precision using algorithms with certain steps is low. It is because of the limited resolution of the laser controller, environment vibration and airflow disturbance, etc.. On the basis of the randomly phase shifting algorithm, the randomly phase shifting algorithm with wavelength tuning is presented. And it is applied to the large aperture wavelength tuning interferometer. The algorithm is simulated and it is proved correct and with high precision. The experimental results show that it can obtain the phases in the wavelength tuning interferometer. The precision is proved high comparing to the ideal phases.