| 短波红外InGaAs焦平面研究进展 |
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| 引用本文： | 李雪,龚海梅,邵秀梅,李淘,黄松垒,马英杰,杨波,朱宪亮,顾溢,方家熊. 短波红外InGaAs焦平面研究进展[J]. 红外与毫米波学报, 2022, 41(1): 129-138. DOI: 10.11972/j.issn.1001-9014.2022.01.009 |
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| 作者姓名： | 李雪 龚海梅 邵秀梅 李淘 黄松垒 马英杰 杨波 朱宪亮 顾溢 方家熊 |
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| 作者单位： | 中国科学院上海技术物理研究所传感技术国家重点实验室,上海200083;中国科学院上海技术物理研究所中国科学院红外成像材料与器件重点实验室,上海200083 |
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| 基金项目： | 国家自然科学基金面上项目（62175250， 62075229）；国家自然基金青年项目（62104238）；上海市科技重大专项（2019SHZDZX01）；上海市优秀学术带头人计划（21XD1404200）；上海市学术科技启明星计划（21QA1410600） |
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| 摘 要： | 围绕新一代遥感探测仪器应用需求,中国科学院上海技术物理研究所在短波红外InGaAs焦平面探测器领域取得了一系列进展.通过低缺陷外延材料、焦平面芯片制备工艺和低噪声读出电路技术研究,研制实现了最大规模达2560×2048元的10μm中心距1～1.7μm InGaAs焦平面探测器,峰值探测率优于1.0×1013 cmHz1...
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| 关 键 词： | 铟镓砷 焦平面 短波红外 暗电流 偏振探测 雪崩倍增 |
| 收稿时间： | 2022-01-01 |
| 修稿时间： | 2022-01-11 |
Recent advances in short wavelength infrared InGaAs focal plane arrays |
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| LI Xue,GONG Hai-Mei,SHAO Xiu-Mei,LI Tao,HUANG Song-Lei,MA Ying-Jie,YANG Bo,ZHU Xian-Liang,GU Yi and FANG Jia-Xiong. Recent advances in short wavelength infrared InGaAs focal plane arrays[J]. Journal of Infrared and Millimeter Waves, 2022, 41(1): 129-138. DOI: 10.11972/j.issn.1001-9014.2022.01.009 |
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| Authors: | LI Xue GONG Hai-Mei SHAO Xiu-Mei LI Tao HUANG Song-Lei MA Ying-Jie YANG Bo ZHU Xian-Liang GU Yi FANG Jia-Xiong |
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| Affiliation: | State Key Laboratories of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China,State Key Laboratories of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China,State Key Laboratories of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China,State Key Laboratories of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China,State Key Laboratories of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China,State Key Laboratories of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China,State Key Laboratories of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China,State Key Laboratories of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China |
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| Abstract: | To meet with the ongoing demand for the development of higher performance space remote sensing instruments,a series of progress in short wavelength infrared InGaAs focal plane arrays(FPAs)has been achieved in Shanghai Institute of Technical Physics.Through the continuous research efforts devoted to the low-defect density epitaxial materials,the FPA processing technologies as well as the low noise read-out circuits,a 10-μm-pitch 1~1.7μm InGaAs FPA with an array format up to 2560×2048,a pixel operability up to 99.7%and a high peak detectivity up to 1.1×1013cmHz1/2/W is realized.A 15-μm-pitch 1~2.5μm extended wavelength InGaAs FPA with an array format of 1280×1024 and a high peak detectivity up to 5.0×1011cmHz1/2/W is also achieved.New principle FPA detectors are also developed,which are a monolithic integrated four-direction polarized 160×128 InGaAs FPA with a high extinction ratio up to 37:1,and a 64×64 InGaAs Geiger-mode avalanche FPA with a fine timing resolution down to 0.8 ns. |
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| Keywords: | InGaAs focal plane array short wavelength infrared dark current polarization detection avalanche multiplication |
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