| 厚膜电容式压力传感器 |
| |
| 引用本文： | 常慧敏,周平,高理升,王英先,徐智晴,刘春艳.厚膜电容式压力传感器[J].传感器世界,2009,15(8):15-17. |
| |
| 作者姓名： | 常慧敏 周平 高理升 王英先 徐智晴 刘春艳 |
| |
| 作者单位： | 中科院合肥智能机械研究所,安徽合肥,230031 |
| |
| 摘 要： | 介绍一种厚膜电容式压力传感器，它以陶瓷弹性体和盖板为电容的电极，电极材料为钯银导体，传感器包括压力敏感芯片和电容一电压转换电路，该芯片是由两块能牢固键合成一体的基板组成，基板材料为96％Al2O3陶瓷。传感器量程为0～200kPa，电容值20pF，非线性0．3％，工作温度一20～＋85℃，零点温漂d＼T-200pom／℃。具有易于批量生产、性能／价格比高等技术优势。
|
| 关 键 词： | 厚膜 电容式 压力敏感芯片 |
Thick-film capacitive pressure transducer |
| |
| CHANG Hui-min,ZHOU Ping,GAO LI-sheng,WANG Ying-xian,XU Zhi-qing,LIU Chun-yan.Thick-film capacitive pressure transducer[J].Sensor World,2009,15(8):15-17. |
| |
| Authors: | CHANG Hui-min ZHOU Ping GAO LI-sheng WANG Ying-xian XU Zhi-qing LIU Chun-yan |
| |
| Affiliation: | CHANG Hui-min,ZHOU Ping,GAO LI-sheng,WANG Ying-xian,XU Zhi-qing,LIU Chun-yan (Hefei Institute of Intelligent Machines,Chinese Academy of Sciences,Hefei 230031,China) |
| |
| Abstract: | A thick-film capacitive pressure transducer is presented in this paper, in which the ceramic elastomer and cover board made of Pd-Ag are treated as electrodes of capacitor. The transducer includes pressure-sensitive chips and capacitance-voltage converter. The chip consists of two bonding substrates made of 96% Al2O3 . The pressure measuring range is 0 - 200 kPa, the capacity value is about 20pF, the nonlinearity is 0.3%, the operating temperature is -20 ℃ -＋85 ℃, the zero thermal shift is less than 200 ppm/℃ o This transducer has advantages of easy mass production and high costperformance ratio. |
| |
| Keywords: | thick film capacitive pressure sensor |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
