Porosification behaviour of LTCC substrates with potassium hydroxide |
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Authors: | Ali Hajian Michael Stöger-Pollach Michael Schneider Doruk Müftüoglu Frank K. Crunwell Ulrich Schmid |
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Affiliation: | 1. Institute of Sensor and Actuator Systems, TU Wien, Gusshausstrasse 27–29, 1040 Vienna, Austria;2. University Service Centre for Transmission Electron Microscopy, TU Wien, Wiedner Hauptstrasse 8–10, 1040 Vienna, Austria;3. CM Solutions (Pty) Ltd, 89J Victoria Drive, London SW19 6PT, UK |
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Abstract: | The demand to meet advanced substrate requirements in terms of electrical, mechanical, thermal, and dielectric properties has led to an increasing interest in low temperature co-fired ceramics (LTCC). However, LTCC materials suffer from high permittivity. We recently showed that the wet-chemical porosification under acidic conditions allows the reduction of the permittivity of LTCCs in the as-fired state. In the present study, potassium hydroxide solution was employed as an alternative etchant which features a suitable bearing plane for further metallization lines. Various characterization techniques, including scanning and transmission electron microscopy, energy-dispersive X-ray spectroscopy, X-ray diffraction analysis, and electron energy loss spectroscopy were used for investigation of the morphology and chemical composition of the substrates. Three-dimensional information of the surface topography was acquired by means of MeX® Alicona software and the obtained roughness parameters confirmed the advantage of the proposed approach over acid treatment when targeting an enhanced surface quality. |
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Keywords: | LTCC Wet-chemical etching Permittivity reduction Porosification Glass-ceramics |
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