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多芯片叠层封装中的芯片应力分析及结构优化
引用本文:刘彪,王明湘,林天辉.多芯片叠层封装中的芯片应力分析及结构优化[J].半导体技术,2005,30(11):11-16.
作者姓名:刘彪  王明湘  林天辉
作者单位:苏州大学微电子学系,江苏,苏州,215021;AMD半导体苏州有限公司,江苏,苏州,215021
摘    要:针对典型的四层芯片叠层封装产品,采用正交试验设计与有限元分析相结合的方法研究了芯片、粘合剂、顶层芯片钝化层和密封剂等十个封装组件的厚度变化对芯片上最大热应力的影响,并利用找到的主要影响因子对封装结构进行优化.结果表明,该封装产品可以在更低的封装高度下实现,并具有更低的芯片热应力水平及更小的封装体翘曲,这有助于提高多芯片叠层封装产品的可靠性.

关 键 词:芯片应力分析  多芯片封装  有限元分析  可靠性
文章编号:1003-353X(2005)11-0011-06
收稿时间:2004-11-26
修稿时间:2004年11月26日

Chip Stress Analysis and Structure Optimization in Stacked Multi-Chip Package
LIU Biao,WANG Ming-xiang,LIN Tian-hui.Chip Stress Analysis and Structure Optimization in Stacked Multi-Chip Package[J].Semiconductor Technology,2005,30(11):11-16.
Authors:LIU Biao  WANG Ming-xiang  LIN Tian-hui
Affiliation:1.Department of Microelectronics. Soochow University, Suzhou 215021, China; 2. AMD Suzhou Ltd. Suzhou 215021, China
Abstract:Finite element analysis and design of experiments are adopted to systematically investigate the influence of component thicknesses on maximum thermal stress of die for a typical stacked four-chip package (MCP) structure. These components include all layers involved in MCP structure such as dies,die attaches,mould compound,and top die passivation. Structure optimization of the package design in different approaches shows that thinner package body,lower chip stress level and smaller package warpage can be realized in this product. The study would be beneficial to improve the reliability of stacked MCP products.
Keywords:chip stress analysis  multi-chip package  finite element analysis  reliability
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