Si3N4陶瓷表面Ni-Ti复合渗镀合金化研究

在多元离子复合渗镀装置中,采用二元复合靶对 Si_3N_4陶瓷表面进行 Ni-Ti 复合渗镀,实现了 Si_3N_4陶瓷表面的合金化。采用 EDS、SEM、XRD 分析方法和声发射划痕试验对陶瓷表面的渗镀层进行分析。结果表明:渗镀层中含有镍、钛、铁等元素,各元素分布较为均匀,没有明显的成分聚集现象;渗镀层与 Si_3N_4陶瓷基体界面成分过渡连续,没有微观和宏观缺陷。声发射划痕试验结果表明,渗镀层与陶瓷基体结合得较好,在100 N 的最大载荷下,渗镀层没有出现剥离和崩落现象。

Ni-Ti composite diffusion coating on Si3N4 ceramic surface

Using multiple ion composite diffusion coating alloy(MICDCA)technology and Ni-Ti composite target,titanium and nickel were deposited on Si_3N_4 ceramic surface.The composite diffusion-coating layer was tested by EDS,SEM,XRD and sound emissive scratch test etc.It was indicated that the composite diffusion-coating layer contained such elements as nickel, titanium and iron,etc.Every element distributed uniformly,and there was no obvious composition gathering.XRD result indicated that the diffusion-coating alloy layer was composed of Ni_3Ti_3O,Ni and NiTi.Sound emissive scratch test(SEST)was used to test the join strength between alloy layer and Si_3N_4 ceramic,it indicated that no stripped layer was found under the maximum load of 100 N.