梳齿式MEMS加速度计在冲击下的失效分析

对Si基梳齿式MEMS加速度计在冲击下进行了失效分析,验证了其主要失效模式,分析了其失效机理。通过机械冲击实验并采用扫描电镜(SEM)、X射线透视系统、扫描声学显微镜(SAM)观察及电性能测试等分析技术,研究了梳齿式MEMS加速度计在冲击载荷下的结构与封装失效,运用材料力学理论加以分析论证,发现悬臂梁断裂是较为主要的失效模式,且此类器件的封装失效主要表现为气密性失效和装配工艺失效,为MEMS器件的可靠性设计提供了重要依据。

Failure Analysis of MEMS Accelerometers with Comb Structures Under Shock

Failures of Si-based comb MEMS accelerometers under shock were analyzed.In addition,some failure modes were analyzed and determined and some failure mechanisms were pre-sented.The failures in structure and packaging of MEMS accelerometers with comb structures under shock were studied by mechanical shock experiments and some techniques such as scanning electron microscopy (SEM),X-Ray transmission system,scan acoustic microscope (SAM) inspection and electrical properties tests.It was also analyzed and demonstrated by theory of material mechanics.The results show that the main failure mode is rupture of cantilevers,moreover,the package failures of the kind of devices are leakage and failures occurred in assembling process,which provides an important basis for reliability design of MEMS devices.