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Characterization of Low Pressure RF Plasma Heating
作者单位:Wenxia Pan; Fanxiu Lu; Toyonobu Yoshida (Materials Science and Engineering School,University of Science and Technology Beijing,Beijing 100083,China)(Department of Metallurgy,The University of Tokyo,Tokyo 113,Japan)
摘    要:


Characterization of Low Pressure RF Plasma Heating
Authors:Wenxia Pan  Fanxiu Lu  Toyonobu Yoshida
Abstract:Compacts of a-Al2O3 and Mo powder were heated in radio-frequency (RF) induced low pressure N2, H2,Ar, and their mixture plasma. An optical pyrometer, a radiation pyrometer, and a system called Accufiber Model310 were used to measure the temperature of compacts heated in the plasma. The results indicate that there are different heat transfer mechanisms from plasma to specimens of different physical properties. The Ar plasma showed thehighest heating ability among N2, H2, and Ar plasma for Al2O3 specimens, whereas the H2 plasma could heat Mospecimens to a higher temperature than the Ar plasma did, even under the same generating conditions.
Keywords:plasma heating  temperature measurement  heat transfer mechanism
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