Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering |
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| Authors: | Petr Vašina Pavel Souček Tereza Schmidtová Marek Eliáš Vilma Buršíková Mojmír Jílek Mojmír Jílek Jan Schäfer Jiří Buršík |
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| Affiliation: | 1. Laboratory of Active Components and Materials, Larbi Ben M''Hidi University, Oum El Bouaghi, 04000, Algeria;2. Physics Department, Abbes Laghrour - Khenchela University P.O 1252, 40004, Algeria;3. LASMIS, Université de Technologie de Troyes, Pôle Technologique Sud Champagne, 26 Rue Lavoisier, 52800 Nogent, France;4. Département de pharmacie, Faculté de Médecine, Université Salah Boubnider Constantine 3. Nouvelle ville Ali Mendjeli, Constantine, Algeria;5. Arts et Metiers Institute of Technology, LABOMAP, HESAM Université, F-71250 Cluny, France;6. Moltech Anjou, Université d''Angers/CNRS UMR 62002, Bd Lavoisier, 49045 Angers cedex, France;1. Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden;2. Department of Chemistry, The Ångström Laboratory, Uppsala University, P.O. Box 538, SE-751 21 Uppsala, Sweden;3. Impact Coatings AB, Westmansgatan 29, SE-582 16 Linköping, Sweden;1. Institut de Science des Matériaux de Mulhouse, CNRS-UMR 7361, Université de Haute-Alsace, Mulhouse, France;2. Institut de Physique et de Chimie des Matériaux de Strasbourg, CNRS-UMR 7504, BP 43, 67034 Strasbourg, France |
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| Abstract: | Nanocrystalline titanium carbide embedded in an hydrogenated amorphous carbon matrix (nc-TiC/a-C:H) shows high hardness and Young's modulus together with low wear and low friction coefficient. In this paper, we report on the preparation of well adherent nc-TiC/a-C:H coatings ~ 5 μm thick on stainless steel substrates using a well balanced magnetic field configuration and only very low power RF bias on the substrate. Hardness and Young's modulus of these coatings are 43 GPa and 380 GPa, respectively. The mechanical properties – hardness and Young's modulus – measured from the coating's top reach the values obtained at optimized experiments where the unbalanced magnetic field configuration was used. A simple method of depth profiling suitable for evaluation of mechanical properties of several micrometers thick coatings is developed and employed. The paper reports on the depth profile analyses of the coating hardness, Young's modulus, composition and morphology. |
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