Synthesis and thermal behavior of [Li(thf)_3(μ-Cl)La{N(SiMe_3)_2}_3] and its investigation as spin-coating precursor for lanthanum-based layer formation

The lanthanum(Ⅲ) complex Li(thf)_3(μ-CI)La{N(SiMe_3)_2}_3](3) was obtained by the reaction of LaCl_3 with three equiv of LiN(SiMe_3)_2]_3 in a tetrahydrofuran solution. The molecular structure of 3 in the solid state was characterized by a tetracoordinated anionic lanthanide(Ⅲ) amide in form of an adduct with LiCl(thf)_3 as evidenced by single crystal X-ray structure analysis. In order to study the suitability of 3 as a precursor for the deposition of La_2O_3/LiLaSiO4 by thin layer deposition techniques,its thermal behavior was investigated by thermogravimetry(TG) and TG-MS-coupled studies. TG studies show a two-step decomposition process, whereby volatile decomposition products can be detected during the second decomposition step. TG measurements under an atmosphere of oxygen produced La_2O_3, Calcination processes of 3 under ambient atmosphere for 10 h at 1000 ℃ gave La_2O_3 and LiLaSiO_4,which was confirmed by PXRD studies. Metal-organic 3 was applied as spin-coating precursor for La_2O_3 thin film formation giving the as-deposited layers nearly crack-free.