State-of-the-art of non-destructive measurement of sub-surface material properties and damages

The possibilities of common non-destructive measuring techniques are reviewed in this paper for their applications in precision engineering. The grazing X-ray technique is believed to be a powerful improvement of the conventional X-ray techniques under both the diffraction mode and the fluorescent mode. Information of the crystallographic structure and chemical composition can be obtained to a nanometre resolution. Ultrasound can be used in scanning acoustic microscopy to give information on the physical or even chemical nature of superficial layers. Raman spectroscopy has now become an important tool for studying superficial structures, chemical composition and stresses in cyrstalline and amorphous materials: it is recommended to use this method especially for the investigation of monocrystalline silicon and germanium. The instrumented microindentation technique is a quasi- non-destructive technique for evaluating mechanical material properties like hardness and Young's modulus in a nanometre range. It can be used on any material that does not require special surroundings like a vacuum. Photothermal microscopy has been developed recently for the non-destructive testing of the local thermal properties of materials. By using the Mirage effect and its local measurement above the surface, a non-destructive depth profiling of surface damages can be obtained.