| 荷能团簇束成膜的表面迁移和附着特性的研究 |
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| 引用本文： | 俞国庆,石瑛,欧阳振乾,陈景升,张志滨,朱德彰,潘浩昌,徐洪杰.荷能团簇束成膜的表面迁移和附着特性的研究[J].核技术,2001,24(2):81-84. |
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| 作者姓名： | 俞国庆 石瑛 欧阳振乾 陈景升 张志滨 朱德彰 潘浩昌 徐洪杰 |
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| 作者单位： | 中国科学院上海原子核研究所 |
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| 基金项目： | 国家自然科学基金(19675062)和中国科学院基础研究局资助 |
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| 摘 要： | 研究了不同能量的团簇碰撞有机物（CH3SiO3/2)衬底形成的表面形貌。结果表明，团簇能量的增大、增加了团簇原子在基片表面的有效碰撞能和迁移力，也改善了沉积薄膜的附着性、致密性、平整性等。特别是有机物上修饰条纹的出现，是迁移力增加的有力证据。
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| 关 键 词： | 原子力显微镜 迁移性 附着性 有机硅化合物 荷能团簇束成膜 |
| 修稿时间： | 1999年4月13日 |
A study on the properties of surface migration and adhesion during energetic cluster impact deposition |
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| Yu Guoqing,SHI Ying,OUYANG Zhenqian,CHEN Jingshen,ZHANG Zhibin,ZHU Dezhang,PAN Haochang,Xu Hongjie.A study on the properties of surface migration and adhesion during energetic cluster impact deposition[J].Nuclear Techniques,2001,24(2):81-84. |
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| Authors: | Yu Guoqing SHI Ying OUYANG Zhenqian CHEN Jingshen ZHANG Zhibin ZHU Dezhang PAN Haochang Xu Hongjie |
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| Abstract: | The surface morphology of organic material (CH3SiO3/2 ) bombarded by energetic cluster beam was investigated by Atomic Force Microscopy (AFM). The results showed that the migration and adhesion of cluster constituent atoms on the surface would be improved if the cluster energy gradually increased, accordingly improving the quality of film. Especially, the existence of convex stripes on the surface indicated the diffusion ability increased with the increasing cluster energy. |
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| Keywords: | Energetic cluster AFM Surface migration and adhesion |
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