非球面在线检测的系统误差分离与修正

为了解决非球面在线检测的系统误差问题,针对系统误差产生的机理、误差的数学模型、分离方法以及补偿方法进行了研究.提出一种将空间误差投影到不同平面上进行分析从而解决测量系统误差的新方法并建立了各系统误差的数学模型.根据最小二乘法的基本思想,建立了基于标准球面的系统误差分离数学模型,得到了各参数的最小二乘估计值,并利用误差修正模型进行了校正.利用标准球面进行测量实验,验证了该方法的有效性和精确性.实验结果表明所提出的解决测量系统误差的思路可行,最终可使测量系统精度达到1μm数量级,从而满足精磨阶段在线检测的需要.

System Error Separation and Revision for Aspheric Lens On-Machine Measurement

For the system errors in aspheric lens on-machine measurement,their mechanism,mathematic model,separation and compensation methods were investigated.A new approach of projecting spatial errors onto different planes for eliminating system errors was presented and the mathematic models for system errors were established.Based on the principle of the least square method,system error separation model for standard lens was set up and the least square estimations of the parameters were obtained and revised with error revision model.Measurement tests for standard lens were conducted to verify the effectiveness and precision of the proposed method.Test results indicate that the proposed approach is feasible and the precision of the on-machine measurement is up to 1μm magnitude order,which meets the requirement of fine grinding.