| SnO_2/ZnO双层膜的表面界面及气敏特性 |
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| 引用本文： | 娄向东,沈荷生.SnO_2/ZnO双层膜的表面界面及气敏特性[J].传感器与微系统,1994(4):7-11. |
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| 作者姓名： | 娄向东 沈荷生 |
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| 作者单位： | 河南师范大学
(娄向东)，中国科学技术大学
(沈荷生)，中国科学技术大学(沈瑜生) |
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| 摘 要： | 用溅射法制备了SnO_2/ZnO薄膜,采用XPS,AFS,SEM,等手段研究了薄膜的表面及界面,发现在薄膜中,锌与锡存在不同深度的相互扩散,从SEM的断面观察可看到有一个明显的界面存在。XRD分析则表明:ZnO极易沿(002)面择优取向生长。并且SnO_2/ZnO膜具有良好的气敏性质。
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| 关 键 词： | SnO_2 ZnO 薄膜 扩散 气敏 |
The Surface Interface and Gas- sensing Properties of SnO_2/ZnO Bilayer Film |
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| Lou Xiangdong Shen Hesheng Shen Yusheng.The Surface Interface and Gas- sensing Properties of SnO_2/ZnO Bilayer Film[J].Transducer and Microsystem Technology,1994(4):7-11. |
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| Authors: | Lou Xiangdong Shen Hesheng Shen Yusheng |
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| Affiliation: | Lou Xiangdong Shen Hesheng Shen Yusheng(Henan Normal University) (University of Science and Technology of China) |
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| Abstract: | The SnO_2/ZnO bikyer thin film was prepared by d. c. sputting technique. The suface, interface of the Mayer was studied by XPS, AES methods. The results of XPS and AES have shown the diffusion of Zn atoms to SnO2 layer is much faster than that of Sn to ZnO layer in the SnO2/ZnO bilayer. On the surface of the bilayer has a few of adsorbed oxygen. The growth of ZnO grains oriented at (002) direction in ZnO film which confirmed by XRD. Gas-sensing properties of SnO2/ZnO were also studied. It was found that the bikyer has better sensitivity and selectivity. |
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| Keywords: | SnO_2 ZnO Thin film Diffusion Gas-sensing |
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