| 基于电纺纤维的CuO/SnO_2薄膜及其气敏特性 |
| |
| 引用本文： | 赵燕,何秀丽,贾建,高晓光,李建平. 基于电纺纤维的CuO/SnO_2薄膜及其气敏特性[J]. 微纳电子技术, 2012, 49(7): 449-453 |
| |
| 作者姓名： | 赵燕 何秀丽 贾建 高晓光 李建平 |
| |
| 作者单位： | 中国科学院电子学研究所传感技术国家重点实验室,北京,100190 |
| |
| 基金项目： | 国家自然科学基金资助项目 |
| |
| 摘 要： | 研究了一种基于静电纺丝纳米纤维制备异质结薄膜的方法。采用静电纺丝技术在硅衬底上依次沉积PVP/CuCl2.2H2O和PVP/SnCl4.5H2O纳米纤维,经过氧等离子体刻蚀并高温退火处理后得到了基于多孔纳米纤维的CuO/SnO2异质结薄膜。利用扫描电子显微镜(SEM)和X射线衍射技术(XRD)对纤维的形貌和结晶状态进行了表征。电学特性及气敏特性测试结果表明,该异质结薄膜具有明显的整流特性,在100℃的工作温度下,对H2S气体响应和恢复速度快、检测限低、选择性好。
|
| 关 键 词： | 静电纺丝 纳米纤维 异质结薄膜 等离子体刻蚀 气敏特性 |
Fabrication and Gas Sensing Properties of CuO/SnO2 Films Based on Electrospun Nanofibers |
| |
| Zhao Yan , He Xiuli , Jia Jian , Gao Xiaoguang , Li Jianping. Fabrication and Gas Sensing Properties of CuO/SnO2 Films Based on Electrospun Nanofibers[J]. Micronanoelectronic Technology, 2012, 49(7): 449-453 |
| |
| Authors: | Zhao Yan He Xiuli Jia Jian Gao Xiaoguang Li Jianping |
| |
| Affiliation: | (State Key Laboratory of Transducer Technology,Institute of Electronics, Chinese Academy of Sciences,Beijing 100190,China) |
| |
| Abstract: | A novel method to fabricate the heterojunction film based on electrospun nanofibers was studied.The PVP(poly vinyl pyrrolidone)/CuCl2·2H2O and PVP/SnCl4·5H2O nanofibers were deposited on the silicon substrate successively with the electrospinning technology.The heterojunction film of CuO/SnO2 based on porous nanofibers were obtained after oxygen plasma etching and high temperature annealing.The morphology and crystalline structure of the fibers were characterized by scanning electron microscope(SEM) and X-ray diffraction(XRD).The electrical and the gas sensing properties of the hetrojunction film were measured.The hetrojunction film show good rectifying behavior indicating the formation of a diode.Furthermore,the he-terojunction film shows fast response/recovery,low detection limit and good selectivity to H2S at the operating temperature of 100 ℃ due to the porous structure of nanofibers. |
| |
| Keywords: | electrospinning nanofiber heterojunction film plasma etching gas sensing property |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
