Adaptive control for the conventional mode of operation of MEMS gyroscopes |
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Authors: | Sungsu Park Horowitz R. |
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Affiliation: | PATH, Univ. of California, Berkeley, CA, USA; |
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Abstract: | This paper presents adaptive add-on control algorithms for the conventional mode of operation of MEMS z-axis gyroscopes. This scheme is realized by adding an outer loop to a conventional force-balancing scheme that includes a parameter estimation algorithm. The parameter adaptation algorithm estimates the angular rate, identifies and compensates the quadrature error, and may permit on-line automatic mode tuning. The convergence and resolution analysis show that the proposed adaptive add-on control scheme prevents the angular rate estimate from being contaminated by the quadrature error, while keeping ideal resolution performance of a conventional force-balancing scheme. |
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