Fabrication and drive test of a peristaltic thermopnumatic PDMS micropump |
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| Authors: | Ok Chan Jeong Sin Wook Park Sang Sik Yang |
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| Affiliation: | (1) Center for Promotion of the COE program, Ritsumeikan University, 1-1-1 Nojlhigashi, Shiga 525-8577 Kusatsu, Japan;(2) Division of Electrical and Computer Engineering, Ajou University, San 5 Wonchun-Dong, Suwon 443-749 Yeongtong-Gu, Korea |
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| Abstract: | This paper presenti, fabrication and drive test of a peristaltic PDMS micropump actuated by the thermopneumatic force The
micropump consists of the three peristaltic-type actuator chambers with microheaters on the glass substrate and a microchannel
connecting the chambers and the inlet/outlet port The micropump is fabricated by the spin-coating process, the two-step curing
process, the JSR (negative PR) molding process, and etc The diameter and the thickness of the actuator diaphragm are 2 5 mm
and 30 μm, respectively The meniscus motion in the capillary tube is observed with a video camera and the flow rate of the
micro pump is calculated through the frame analysis of the recorded video data. The maximum flow rate of the micropump is
about 0 36 μL/sec at 2 Hz for the zero hydraulic pressure difference when the 3-phase input voltage is 20 V. |
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| Keywords: | PDMS (Polydimethylsiloxane) Micropump Peristaltic Micropump Thermopneumatic Force Flow Rate |
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