基于Al掺杂ZnO的丙酮气敏传感器以及紫外光激发对其气敏性能的影响

采用溶胶凝胶法制备的Al掺杂ZnO纳米粉末（AZO）。利用X射线衍射（XRD）和扫描电子显微镜（SEM）表征样品的晶体结构和表面形貌。采用浸渍提拉法将该样品制成旁热式气体传感器，检测其对不同气体的响应恢复特性。结果表明：Al掺杂ZnO表面粗糙，Al的掺杂能够抑制ZnO晶粒增长。当工作温度为70℃、湿度为27%RH时，4.98wt.%Al掺杂ZnO对丙酮气体具有很好的选择性，电阻灵敏度达到了14075，响应和恢复时间分别为1 s和3 s。紫外光照射可明显提高传感器的气敏特性，并降低工作温度。

Acetone gas sensor based on Al-doped ZnO and influence of ultraviolet excitation on gas-sensing properties

Al-doped ZnO(AZO)nanopower were prepared by sol-gel method. The crystal structure and surface topog?raphy were characterized by X-ray diffraction(XRD)and scanning electron microscopy(SEM),and tested the ultravi?olet-visible light spectrum of the sample to calculate the optical band-gap energy. With the sample as sensitive mate?rial heater gas sensor using coating method and tested the response-recovery properties of different gases. The results show that the surface of AZO is rough,and Al-doped restrains grain growth of AZO. The band-gap energy changed due to the doping of Al. When working temperature is 70℃and humidity is 27%RH,good selectivity to acetone is found with the doping the amount of 4.98wt%. The maximum sensitivity is 14 075,response and recovery time are 1 s and 3 s,respectively. UV-irradiation can improve gas sensing properties and reduced operating temperatures.