| 高精度测量高分辨力的定位控制传感器 |
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| 引用本文： | 王承钢,汪德宝,杨自本,叶孝佑,翟富华.高精度测量高分辨力的定位控制传感器[J].现代计量测试,1994(2). |
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| 作者姓名： | 王承钢 汪德宝 杨自本 叶孝佑 翟富华 |
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| 作者单位： | 中国计量科学研究院 |
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| 摘 要： | 本文所介绍的高精度测量、高分辨力的定位控制传感器是一种柔性接触定位系统，由光学、电感、和电子器件等各部分组成，集当代一些高新技术一体的高新科技器件。其定位分辨力，优于０．００５ｕｍ．可供高精度位移（或长度）测量仪器设计中选用。
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The Control Sensor for Fixing the Position with High Accuracy and High Resolution |
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| Wang Chenggang, Wang Debao,Yang Ziben, Ye Xiaoyou, Zhai Fuhua.The Control Sensor for Fixing the Position with High Accuracy and High Resolution[J].Modern Measurement and Test,1994(2). |
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| Authors: | Wang Chenggang Wang Debao Yang Ziben Ye Xiaoyou Zhai Fuhua |
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| Affiliation: | National institute of Metrology |
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| Abstract: | The sensor for fixed position with high accuracy measurement andlfine resolution introducd in this paper,it is a flexibly contacted system.It iscombined with optics, machinary, inductance and electronic device etc. It is ahigh and new scientific and technical device,in which concentrated some highand new technologies. The resolution of the fixed position is better than 0.005pm. It is may be used in instrument of displacement(or length) measurementde signing. |
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| Keywords: | OFN |
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