| 溶胶-凝胶法制备铁电薄膜的研究进展 |
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| 引用本文： | 向飞.溶胶-凝胶法制备铁电薄膜的研究进展[J].机电工程技术,2011,40(8):96-98,203,204. |
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| 作者姓名： | 向飞 |
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| 作者单位： | 广东省机械研究所,广东广州,510635 |
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| 摘 要： | 溶胶-凝胶法是制备铁电薄膜的一种重要方法。综述了溶胶-凝胶法制备铁电薄膜的原理、工艺过程、特点,以及采用此方法制备出的某些材料的铁电性能。最后指出,溶胶-凝胶法制备铁电薄膜工艺仍需优化和改进,薄膜的质量亟待提高,以适应器件的要求。
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| 关 键 词： | 溶胶-凝胶 铁电薄膜 应用 |
Latest Progress on Preparation of Ferroelectric Films by Sol-Gel Method |
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| XIANG Fei.Latest Progress on Preparation of Ferroelectric Films by Sol-Gel Method[J].Mechanical & Electrical Engineering Technology,2011,40(8):96-98,203,204. |
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| Authors: | XIANG Fei |
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| Affiliation: | XIANG Fei (Guangdong Mechanical Research Institute,Guangzhou510635,China) |
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| Abstract: | Sol-Gel method is an important method for preparation of ferroelectric thin films.Not only the principle,technology and peculiarities,but also ferroelectric properties of some materials prepared by Sol-Gel were reviewed.In the end,it is pointed out that the process of Sol-Gel should still be optimized and developed and the quality of ferroelectric thin films needed to be improved urgently,so as to adapt the requirement of devices. |
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| Keywords: | Sol-Gel ferroelectric thin film application |
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