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扭摆型隧穿磁强计的设计方法研究
引用本文:阎梅芝,董哲,任大海,尤政.扭摆型隧穿磁强计的设计方法研究[J].仪器仪表学报,2006,27(9):1154-1158.
作者姓名:阎梅芝  董哲  任大海  尤政
作者单位:清华大学精密仪器与机械学系,北京,100084
摘    要:本文提出了一种扭摆、谐振型隧穿式磁强计及其设计方法,它采用扭摆型线圈敏感被测磁场,结构易于加工且能够有效降低1/f噪声的影响。通过理论推导建立了扭摆和扭梁的力学模型,得出了磁强计灵敏度与扭梁刚度的关系,通过仿真说明了系统中各结构参数之间的关系,得到了隧穿式磁强计的设计原则,运用提出的设计流程和原则,进行了磁强计实例设计,在ANSYS下对此模型进行了固有频率和静态变形仿真,仿真结果与通过设计方法得出的值吻合较好,从而验证了模型的可靠性和方法的合理性。

关 键 词:隧穿  磁强计  扭摆型  硅尖
修稿时间:2005年5月1日

Research of tortional tunneling magnetometer designing method
Yan Meizhi,Dong Zhe,Ren Dahai,You Zheng.Research of tortional tunneling magnetometer designing method[J].Chinese Journal of Scientific Instrument,2006,27(9):1154-1158.
Authors:Yan Meizhi  Dong Zhe  Ren Dahai  You Zheng
Abstract:A torsional,resonant-type tunneling magnetometer and its designing method are presented.A torsional coil was employed on the pendulum to sense the magnetic field,which makes it easy to fabricate and eliminates the 1/f noise effectively.The mechanical models of the torsion pendulum and the torsion beam were established through theoretical analysis,from which the relationship between the magnetometer sensibility and the elastic constant of the torsion beam was obtained.Moreover,the relationship among various structural parameters was derived through simulation and the design principles for torsional resonant-type tunneling magnetometer were concluded.Using these design principles and steps,a torsional pendulum of the magnetometer was designed.The inherent frequency and the static distortion of this design module were simulated in ANSYS.It can be seen that the designing results from the proposed method are in good accordance with the simulation results,which validate the reliability of the model and the rationality of the designing method.
Keywords:tunnelingmagnetometertorsional typesilicon tip
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