| LiCl/SiO2薄膜的制备及湿敏性能 |
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| 引用本文： | 孔令兵,张良莹,姚熹.LiCl/SiO2薄膜的制备及湿敏性能[J].硅酸盐学报,1998,26(4):483-489. |
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| 作者姓名： | 孔令兵 张良莹 姚熹 |
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| 作者单位： | 西安交通大学电子材料与器件研究所 |
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| 摘 要： | 采用溶胶－凝胶工艺，制备了ＬｉＣｌ／ＳｉＯ２多孔薄膜湿敏薄材料，薄膜采用提拉法在氧化铝基片上制成，用ＳＥＭ技术对薄膜的孔结构和表面形貌进行了观察，用ＸＲＤ技术研究了热处理温度对ＬｉＣｌ／ＳｉＯ２凝胶结晶行为的影响，研究了ＬｉＣｌ／ＳｉＯ２薄湿敏特性。
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| 关 键 词： | 氯化锂 二氧化硅 薄膜 湿敏性 陶瓷 |
PREPARATION AND HUMIDITY SENSING PROPERTY OF LiCl/SiO2 FILMS |
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| Kong Lingbing,Zhang Liangying,Yao Xi.PREPARATION AND HUMIDITY SENSING PROPERTY OF LiCl/SiO2 FILMS[J].Journal of The Chinese Ceramic Society,1998,26(4):483-489. |
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| Authors: | Kong Lingbing Zhang Liangying Yao Xi |
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| Abstract: | Sol-gel process was used to prepare LiCl/SiO 2 humidity sensor.The LiCl/SiO 2 film was fabricated on Al 2O 3 substrate by dip-coating method .SEM was employed to analysis the microstructure and surface character of LiCl/SiO 2 films.The crystallization of dried gels of LiCl/SiO 2 was investigated by XRD.Then humidity sensing property of the film was studied. |
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