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Fabrication of Highly Ordered Silicon Oxide Dots and Stripes from Block Copolymer Thin Films |
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| Authors: | S. Park B. Kim J.‐Y. Wang T. P. Russell |
| Affiliation: | Department of Polymer Science and Engineering, University of Massachusetts, Amherst, MA 01003 (USA) |
| Abstract: | |
| Keywords: | Block copolymers Nanopatterning Silicon oxides Surface patterning Template‐directed synthesis |