Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components |
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Authors: | L Dellmann S Roth C Beuret L Paratte G-A Racine H Lorenz M Despont P Renaud P Vettiger N F de Rooij |
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Affiliation: | (1) Institute of Microtechnology, University of Neuchatel, Rue Jaquet-Droz 1, CH-2007 Neuchatel, Switzerland, CH;(2) Swiss Federal Institute of Technology, DMT-IMS, CH-1015 Lausanne, Switzerland, CH;(3) IBM Zürich Research Laboratory, CH-8803 Rüschlikon, Switzerland, CH |
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Abstract: | We report on recent advances in micro fabrication technology using micromoulding and high-aspect ratio structuring of photopolymer.
The direct application is the realization of components for millimeter-size, ultrasonic piezoelectric motors. A new fabrication
process using a thick epoxy-based material (SU-8) and the electroplating of nickel is demonstrated. Photopolymer structures
have also been realized and released using a positive tone resist as sacrificial layer. The main advantages over past fabrication
methods are better design flexibility, simplicity of the fabrication process, the capability to combine metallic materials
(Ni) with polymeric materials (SU-8), and the use of positive tone resist as a sacrificial layer.
Received: 25 August 1997/Accepted: 23 October 1997 |
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