| 双光子激光三维微细加工及信息存储技术 |
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| 引用本文： | 袁大军,周拥军,蒋中伟,黄文浩,夏安东,褚家如,刘允萍.双光子激光三维微细加工及信息存储技术[J].微纳电子技术,2003(Z1). |
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| 作者姓名： | 袁大军 周拥军 蒋中伟 黄文浩 夏安东 褚家如 刘允萍 |
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| 作者单位： | 中国科学技术大学精密机械与精密仪器系 安徽合肥230026
(袁大军，周拥军，蒋中伟，黄文浩，褚家如)，中国科学院分子反应动力学国家重点实验室 北京100080
(夏安东)，中国科学技术大学精密机械与精密仪器系 安徽合肥230026(刘允萍) |
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| 摘 要： | 利用具有极高脉冲光强的飞秒激光器和对光束进行强聚焦的显微镜装置可以制造具有亚微米精度的三维微器件以及进行三维高密度信息存储。文本介绍了自行开发的双光子微细加工系统以及三维高密度信息存储系统 ,以及用该系统进行三维光学微细加工及三维光学信息存储的实验情况 ,给出了部分利用已建立的加工系统所获得的初步实验结果
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| 关 键 词： | 双光子激发 飞秒激光器 三维微细加工 三维光学信息存储 |
Two-photon laser three-dimensional microfabrication and three-dimensional optical data storage technology |
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| YUAN Da jun ,ZHOU Yong jun ,JIANG Zhong wei ,HUANG Wen hao ,XIA An dong ,CHU Jia ru ,LIU Yun ping.Two-photon laser three-dimensional microfabrication and three-dimensional optical data storage technology[J].Micronanoelectronic Technology,2003(Z1). |
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| Authors: | YUAN Da jun ZHOU Yong jun JIANG Zhong wei HUANG Wen hao XIA An dong CHU Jia ru LIU Yun ping |
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| Affiliation: | YUAN Da jun 1,ZHOU Yong jun 1,JIANG Zhong wei 1,HUANG Wen hao 1,XIA An dong 2,CHU Jia ru 1,LIU Yun ping 1 |
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| Abstract: | By use of the femtosecond laser with extreme high pulse intensity and the microscope with high numerical aperture, it is possible to fabricate the three dimensional microdevice and to process three dimensional optical data storage. We made a complete introduction of the two photon 3D microfabrication system and optical data storage system which were built ty us, including the optical system, the corresponding software and the experiments. Based on the microfabrication system, several preliminary experimental results were given. |
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| Keywords: | two photon excitation femtosecond laser three dimensional microfabrication three dimensional optical data storage |
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