Fluoride compound targets for the sputter deposition of thin films of high-T c superconductors

A new method has been developed for the preparation of sputter targets from a mixture of fluorides of the elements entering into the composition of high-temperature superconductors (HTSC). The composition and structure of the proposed targets, the parameters of their magnetron sputtering, and the properties of obtained HTSC films have been determined. It is established that the YBaCuO films obtained by the magnetron sputtering of YF₃-BaF₂-Cu targets exhibit stable transition into the superconducting state at T _c = 82 K, with the phase transition width not exceeding 3 K.