| 玻璃衬底上RF磁控溅射CIGS薄膜的研究 |
| |
| 引用本文： | 钱群,张丛春,杨春生,丁桂甫,侯捷. 玻璃衬底上RF磁控溅射CIGS薄膜的研究[J]. 微纳电子技术, 2010, 47(11). DOI: 10.3969/j.issn.1671-4776.2010.11.005 |
| |
| 作者姓名： | 钱群 张丛春 杨春生 丁桂甫 侯捷 |
| |
| 作者单位： | 上海交通大学,微纳科学技术研究院,微米/纳米加工技术国家重点实验室,薄膜与微细技术教育部重点实验室,上海,200240 |
| |
| 基金项目： | 国家自然科学基金资助项目(60701012) |
| |
| 摘 要： | 采用射频磁控溅射的工艺,在玻璃衬底上制备得到了铜铟镓硒(CIGS)薄膜。讨论了衬底温度、溅射气压、退火与否对CIGS薄膜与衬底结合力、显微形貌、晶化程度及电阻率的影响。通过能谱(EDS)测试证明了溅射的CIGS薄膜Ga组分比符合高效吸收层的要求,通过X射线衍射(XRD)与扫描电子显微镜(SEM)测试,证明了衬底加热溅射、溅射后450℃空气退火可以有效提高CIGS薄膜与衬底的结合并提高晶化程度。通过四探针法电阻率测试证明了低气压条件下溅射、溅射后退火可以有效降低CIGS的电阻率,通过透射光谱分析证明了CIGS薄膜对可见光有高吸收效率,适合作为太阳电池的高效吸收层。
|
| 关 键 词： | 太阳电池 射频磁控溅射 铜铟镓硒(CIGS) 晶化 电阻率 |
Research of CIGS Thin Films on Glass Substrates by RF Magnetron Sputtering |
| |
| Qian Qun,Zhang Congchun,Yang Chunsheng,Ding Guifu,Hou Jie. Research of CIGS Thin Films on Glass Substrates by RF Magnetron Sputtering[J]. Micronanoelectronic Technology, 2010, 47(11). DOI: 10.3969/j.issn.1671-4776.2010.11.005 |
| |
| Authors: | Qian Qun Zhang Congchun Yang Chunsheng Ding Guifu Hou Jie |
| |
| Affiliation: | Qian Qun,Zhang Congchun,Yang Chunsheng,Ding Guifu,Hou Jie(National Key Laboratory of Micro/Nano Fabrication Technology,Key Laboratory for Thin Film , Microfabrication Technology of Ministry of Education,Research Institute of Micro/Nano Science , Technology,Shanghai Jiao Tong University,Shanghai 200240,China) |
| |
| Abstract: | The copper indium gallium selenide(GIGS)thin film was prepared on glass substrates by RF magnetron sputtering.The influences of the substrate temperature,sputtering pressure and annealing treatment on the bonding force with the substrate,microstructure,crystallization and electric resistivity of the CIGS thin film were discussed.The energy dispersive spectrum(EDS)testing result shows that the Ga proportion of the prepared CIGS thin film satisfies the demand of the high efficiency CIGS absorption layer.The r... |
| |
| Keywords: | solar cell RF magnetron sputtering copper indium gallium selenide(CIGS) crystallization resistivity |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
