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Thermal properties and thermoelectric microdevices with InN thin films
Affiliation:1. Department of Electrical, Electronic and Information Engineering, Kanagawa University, 3-27-1 Rokkakubashi, Kanagawa-ku, Yokohama 221-8686, Japan;2. Department of Electronics, Informatics and Frontiers and High-Tech Research Center, Kanagawa University, 3-27-1 Rokkakubashi, Kanagawa-ku, Yokohama 221-8686, Japan;3. Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology, AIST Tsukuba Central 2 Umezono 1-1-1, Tsukuba 305-8568, Japan
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