| 双频激光干涉定位系统 |
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| 引用本文： | 高文洪.双频激光干涉定位系统[J].山东大学学报(工学版),1987(4). |
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| 作者姓名： | 高文洪 |
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| 作者单位： | 山东工业大学电机工程系 |
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| 摘 要： | 阐述激光定位系统的原理、结构和应用,分析了系统误差。本系统具有双光路结构,定位误差小,光路中采用了光学二倍频,因此定位分辨率高;在电路中两路脉冲信号随时相减处理,使得数据处理速度快。运行和数据处理能够自动完成。
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| 关 键 词： | 激光应用 定位 电子束 |
The Double-frequency Laser Interferometric Location System |
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| Gao Wenhong.The Double-frequency Laser Interferometric Location System[J].Journal of Shandong University of Technology,1987(4). |
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| Authors: | Gao Wenhong |
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| Affiliation: | Dept. of Electr. Eng. |
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| Abstract: | The laser location system is an important component of the electron beam exposure system. The principle, structure and application of the laser location system are described in the paper. The system error is also analysed.The system has two-light line structure and little location error. Because the double frequency of light is adopted in light line, the location system has high rcsolution. Due to the subtractive processing of the two-line pulse signal in the circuit at all time, data-processing is high speed. The running an data processing can bc automatically accomplished. |
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| Keywords: | Laser application Location Electron beam |
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