基于面内补偿的微机电系统离面运动测试

将频闪成像技术和相移显微干涉技术相结合,提出了一种基于面内补偿的微机电系统(MEMS)离面运动测试方法。首先通过相移显微干涉技术自动采集MEMS结构运动周期内不同准静态位置处的数帧相移干涉图像;然后通过图像处理得到每个准静态位置的亮场图像,进行面内位移测试;最后利用面内位移测试结果对离面位移测试进行补偿,即双相位展开算法,完成对于MEMS结构的离面运动测试。实验结果表明:面内运动的测试的精度可达0.01 pixel,静态离面高度测试的重复精度可达0.52 nm,可以完成伴随着面内位移的MEMS离面位移测试。

Out-of-plane motion measurement of MEMS based on compensation of in-plane motion

Combining stroboscopic imaging and phase-stepping microscopic interferometry,a micro-electromechanical system(MEMS) out-of-plane measuring method based on compensation of in-plane motion is established.First,it can automatically acquire interferograms at different quasi-static positions in moving periods of MEMS structures with phase-stepping microscopic interferometry technology.Then,bright-field images at different quasi-static positions can be gained from interferograms by image processing to measure in-plane motions of MEMS structures.Finally,out-of-plane motions of MEMS structures can be compensated by inplane tests results,called as double-phase unwrapping,to complete measurements of MEMS out-of-plane motions.Experimental results indicate that the measuring resolution of in-plane tests is u to 0.01 pixel,and the measuring repetition of static out-of-plane tests is 0.52 nm.It can satisfy the measuring requirements of MEMS out-of-plane motion along with in-plane motion.