| 冰乙酸在超声喷雾热分解法制备ZnO薄膜中的作用 |
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| 引用本文： | 焦宝臣,张晓丹,魏长春,孙建,赵颖.冰乙酸在超声喷雾热分解法制备ZnO薄膜中的作用[J].光电子．激光,2011(4):540-544. |
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| 作者姓名： | 焦宝臣 张晓丹 魏长春 孙建 赵颖 |
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| 作者单位： | 南开大学光电子薄膜器件与技术研究所；;南开大学光电子薄膜器件与技术研究所；;南开大学光电子薄膜器件与技术研究所；;南开大学光电子薄膜器件与技术研究所；;南开大学光电子薄膜器件与技术研究所； |
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| 基金项目： | 国家高技术研究发展规划资助项目(2007AA05Z436,2009AA050602);国家重点基础研究发展规划资助项目(2011CB201605,2011CB201606);国家自然科学基金资助项目(60976051);科技部国际合作重点资助项目(2006DFA62390,2009DFA62580);教育部新世纪人才资助项目(NCET-08-0295);天津科技支撑资助项目(08ZCKFGX03500) |
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| 摘 要： | 采用超声喷雾热分解技术(USP),以二水醋酸锌(Zn(CH<,3>COO)<,2>·2H<,z>O)为原材料.在无碱玻璃衬底上制备了ZnO薄膜.对前驱液pH值、ZnO薄膜结构特性、表面形貌、电学和光学特性的研究结果表明,冰乙酸对ZnO薄膜生长速率具有重要影响.X射线衍射(XRD)和扫描电子显微镜(SEM)测试显示,所有...
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| 关 键 词： | 超声喷雾热分解法(USP) ZnO 冰乙酸 |
Effect of acetic acid on ZnO thin films fabricated by ultrasonic spray pyrolysis |
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| JIAO Bao-chen,ZHANG Xiao-dan,WEI Chang-chun,SUN Jian and ZHAO Ying.Effect of acetic acid on ZnO thin films fabricated by ultrasonic spray pyrolysis[J].Journal of Optoelectronics·laser,2011(4):540-544. |
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| Authors: | JIAO Bao-chen ZHANG Xiao-dan WEI Chang-chun SUN Jian and ZHAO Ying |
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| Affiliation: | Institute of Photo-electronic Thin Film Device and Technique of Nankai University,Tianjin 300071,China;Institute of Photo-electronic Thin Film Device and Technique of Nankai University,Tianjin 300071,China;Institute of Photo-electronic Thin Film Device and Technique of Nankai University,Tianjin 300071,China;Institute of Photo-electronic Thin Film Device and Technique of Nankai University,Tianjin 300071,China;Institute of Photo-electronic Thin Film Device and Technique of Nankai University,Tianjin 300071,China |
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| Abstract: | The ZnO thin films were fabricated on corning eagle 2 000 substrate by ultrasonic spray pyrolysis(USP).The zinc acetate dehydrate was used as source material.By investigating the pH of the initial solution,the structure,surface morphology,electrical and optical properties of the ZnO thin films,it is found that the acetic acid has great effect on the growth rate of ZnO thin films.According to XRD and SEM test results,all samples we obtained are hexagonal wurtzite structure oriented in the(002) cr... |
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| Keywords: | ultrasonic spray pyrolysis(USP) ZnO acetic acid |
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