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基于TDLAS技术的工业环境中HF气体在线监测
引用本文:张志荣,董凤忠,吴边,田明丽,庞涛,涂郭结,夏滑,王煜,倪志波. 基于TDLAS技术的工业环境中HF气体在线监测[J]. 光电子.激光, 2011, 0(11): 1691-1694
作者姓名:张志荣  董凤忠  吴边  田明丽  庞涛  涂郭结  夏滑  王煜  倪志波
作者单位:中国科学院安徽光机所安徽省光子器件与材料重点实验室;中国科学院安徽光机所安徽省光子器件与材料重点实验室;中国科学院安徽光机所安徽省光子器件与材料重点实验室;中国科学院安徽光机所安徽省光子器件与材料重点实验室;中国科学院安徽光机所安徽省光子器件与材料重点实验室;中国科学院安徽光机所安徽省光子器件与材料重点实验室;中国科学院安徽光机所安徽省光子器件与材料重点实验室;中国科学院安徽光机所安徽省光子器件与材料重点实验室;中国科学院安徽光机所安徽省光子器件与材料重点实验室
基金项目:国家“863”计划资助项目(2007AA06Z420)
摘    要:采用1.330μm附近波长的近红外可调谐分布反馈(DFB)激光器作为光源,结合波长调制技术和长光程技术,实时监测工业环境中的HF气体浓度。同时采用Allan方差分析系统的稳定性,选择利用非线性最小二乘法和防脉冲滑动平均滤波等技术手段,长时间测试结果表明,该系统具有实时、连续和非接触快速检测的特点,并且具有大范围、分布式...

关 键 词:可调谐激光吸收光谱(TDLAS)  在线监测  Allan方差  数字滤波  HF气体

In-situ measurement of HF gas in industrial situation based on TDLAS technology
ZHANG Zhi-rong,DONG Feng-zhong,WU Bian,TIAN Ming-li,PANG Tao,TU Guo-jie,XIA Hu,WANG Yu and NI Zhi-bo. In-situ measurement of HF gas in industrial situation based on TDLAS technology[J]. Journal of Optoelectronics·laser, 2011, 0(11): 1691-1694
Authors:ZHANG Zhi-rong  DONG Feng-zhong  WU Bian  TIAN Ming-li  PANG Tao  TU Guo-jie  XIA Hu  WANG Yu  NI Zhi-bo
Affiliation:Anhui Provincial Key Laboratory of Photonic Devices and Materials,Anhui Institute of Optics&Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;Anhui Provincial Key Laboratory of Photonic Devices and Materials,Anhui Institute of Optics&Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;Anhui Provincial Key Laboratory of Photonic Devices and Materials,Anhui Institute of Optics&Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;Anhui Provincial Key Laboratory of Photonic Devices and Materials,Anhui Institute of Optics&Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;Anhui Provincial Key Laboratory of Photonic Devices and Materials,Anhui Institute of Optics&Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;Anhui Provincial Key Laboratory of Photonic Devices and Materials,Anhui Institute of Optics&Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;Anhui Provincial Key Laboratory of Photonic Devices and Materials,Anhui Institute of Optics&Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;Anhui Provincial Key Laboratory of Photonic Devices and Materials,Anhui Institute of Optics&Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;Anhui Provincial Key Laboratory of Photonic Devices and Materials,Anhui Institute of Optics&Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China
Abstract:A distributed feedback(DFB) laser with central wavelength of 1.330 μm is employed as the light source combined with wavelength modulation harmonic detection techniques and long optical-path techniques to in situ monitor HF gas concentration in industral situation.The system′s stability is analyzed with Allan variance.The nonlinear least square method and the pulse-proof moving averaging filter are selected to eliminate the outside influence.Long-term test results demonstrate that the developed system has the advantages of real time,continuous,non-contact and fast monitoring,and it possesses the capability of large scale and distributed remote monitoring.It satisfies different requirements for online monitoring of industrial HF and other gas fugitive emissions.
Keywords:tunable diode laser absorption spectroscopy(TDLAS)  in-situ measurement  Allan variance  digital filter  HF gas
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