| 梯度掺杂结构GaN光电阴极的激活工艺研究 |
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| 引用本文： | 李飙,徐源,常本康,王晓晖,杜玉杰,高频,张俊举. 梯度掺杂结构GaN光电阴极的激活工艺研究[J]. 光电子．激光, 2011, 0(9): 1317-1321 |
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| 作者姓名： | 李飙 徐源 常本康 王晓晖 杜玉杰 高频 张俊举 |
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| 作者单位： | 南京理工大学电子工程与光电技术学院；;南京理工大学电子工程与光电技术学院；;南京理工大学电子工程与光电技术学院；;南京理工大学电子工程与光电技术学院；;南京理工大学电子工程与光电技术学院；;南京理工大学电子工程与光电技术学院；;南京理工大学电子工程与光电技术学院； |
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| 基金项目： | 国家自然科学基金资助项目(60871012) |
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| 摘 要： | 利用自行研制的光电阴极多信息量测试评估系统,在线测试了梯度掺杂结构GaN光电阴极在激活过程中的光电流、Cs源电流和O源电流。根据激活后的阴极光谱响应曲线和量子产额曲线,分析了超高真空室真空度、激活前的阴极表面净化程度、激活中首次进Cs量、激活中的Cs/O比以及Cs/O源在激活中的供给方式等对阴极激活的影响,提出了梯度掺...
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| 关 键 词： | 梯度掺杂 GaN 光电阴极 激活工艺 |
Activation technique of gradient-doping GaN photocathode |
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| LI Biao,XU Yuan,CHANG Ben-kang,WANG Xiao-hui,DU Yu-jie,GAO Pin and ZHANG Jun-ju. Activation technique of gradient-doping GaN photocathode[J]. Journal of Optoelectronics·laser, 2011, 0(9): 1317-1321 |
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| Authors: | LI Biao XU Yuan CHANG Ben-kang WANG Xiao-hui DU Yu-jie GAO Pin ZHANG Jun-ju |
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| Affiliation: | Institute of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210094,China;Institute of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210094,China;Institute of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210094,China;Institute of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210094,China;Institute of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210094,China;Institute of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210094,China;Institute of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210094,China |
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| Abstract: | The data,such as photocurrents,currents of Cs source and O source in the activation process of gradient-doping GaN photocathode,were measured in the preparation and evaluation system designed by us.The effects of vacuum,surface cleaning,the first flux of Cs,Cs/O ratio,and Cs/O flux on/off were analyzed based on the curves of spectral response and quantum yield obtained by testing the gradient-doping GaN photocathode after being fully activated.The optimized activation technique of gradient-dopin... |
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| Keywords: | gradient-doping GaN photocathode,activation technique |
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