| 体硅微机械湿法加工技术研究进展 |
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| 引用本文： | 蒋玉荣,边长贤,秦瑞平.体硅微机械湿法加工技术研究进展[J].材料导报,2011,25(19):13-17. |
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| 作者姓名： | 蒋玉荣 边长贤 秦瑞平 |
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| 作者单位： | 1. 河南师范大学物理与信息工程学院,新乡453007; 河南省光伏材料重点实验室,新乡453007
2. 江西师范大学化学与化工学院,南昌,330000 |
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| 基金项目： | 国家自然科学基金(60571063);河南省重点科技攻关项目(092102210018);河南省教育厅自然科学基金(2011A140014) |
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| 摘 要： | 湿法腐蚀技术成本低,是硅微机械(Micromachining)加工中最基础、最关键的技术。着重讨论了3种主要湿法技术的优缺点,概述了硅的各向同性存在侧向腐蚀、各向异性受晶格限制以及电化学腐蚀受图形尺寸限制的缺点和局限性,探讨了国内外研究现状和湿法腐蚀技术存在的问题及今后电化学腐蚀技术在湿法技术中的地位。
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| 关 键 词： | 体硅技术 各向异性 电化学腐蚀 |
Research Development on Wet Etching Technology for Bulk Silicon |
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| JIANG Yurong,BIAN Changxian,QIN Ruiping.Research Development on Wet Etching Technology for Bulk Silicon[J].Materials Review,2011,25(19):13-17. |
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| Authors: | JIANG Yurong BIAN Changxian QIN Ruiping |
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| Affiliation: | 1,2(1 College of Physics & Information Engineering,Henan Normal University,Xinxiang 453007;2 Henan Key Laboratory of Photoavoltail Materials,Xinxiang 453007;3 College of Chemistry and Chemical Engineering,Jiangxi Normal University,Nanchang 330000) |
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| Abstract: | Wet etching technology plays an important role in micromachining due to the low cost.The characteristics and process of wet etching at home and abroad are introduced.The technology of isotropic etching and anisotropic etching and electrochemical etching are respectively discussed.The problem is analysed for wet etching techno-logy and electrochemical etching will play an important role in wet etching technology. |
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| Keywords: | bulk silicon technology anisotropic electrochemical etching |
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