Design, fabrication and analysis of micromachined high sensitivity and 0% cross-axis sensitivity capacitive accelerometers |
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Authors: | Hamed Farahani James K Mills William L Cleghorn |
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Affiliation: | (1) Department of Mechanical and Industrial Engineering, University of Toronto, 5 King’s College Rd, Toronto, ON, M5S 3G8, Canada |
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Abstract: | This paper presents the design and fabrication of three MEMS based capacitive accelerometers. The first design illustrates
the achievement of an accelerometer with 0% cross-axis sensitivity and has been fabricated using PolyMUMPs, a multi-user surface-micromachining
process. A unidirectional parallel plate configuration is utilized in this design to illustrate the achievement of 0% cross-axis
sensitivity and an acceptable performance range. In addition, a method is introduced to improve the sensitivity of a capacitive
sensor employing a transverse configuration based on the relationship of initial gaps setup in comb-finger arrangements. A
design based on this technique and the PolyMUMPs fabrication process is illustrated which demonstrates a sensitivity value
of 4.07 fF/μm, with a nonlinearity of 2.05% for a ±3 μm sensor operating range. The last design based on this method and the
SOIMUMPs fabrication process exhibits a sensitivity of 3.45 pF/μm for ±1 μm operating range of the sensor. |
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