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高速精密运动平台研制
引用本文:董永谦,狄希远,张志耀,田芳.高速精密运动平台研制[J].电子工艺技术,2011,32(3):173-176.
作者姓名:董永谦  狄希远  张志耀  田芳
作者单位:中国电子科技集团公司第二研究所;
摘    要:根据生瓷带打孔机对运动平台的特殊要求,设计了高速精密运动平台方案,分别从高刚度机械结构、直线电机及同步控制、运动误差补偿等三个方面详细阐述了具体的实施方案及解决措施,并采用三种方法对平台的性能进行了验证.通过验证证明,平台达到很高的加速度和定位精度,达到了平台设计的预期目标.

关 键 词:运动平台  直线电机  高速精密定位  同步控制

Development of High Speed and Precision Motion Platform
DONG Yong-qian,DI Xi-yuan,ZHANG Zhi-yao,TIAN Fang.Development of High Speed and Precision Motion Platform[J].Electronics Process Technology,2011,32(3):173-176.
Authors:DONG Yong-qian  DI Xi-yuan  ZHANG Zhi-yao  TIAN Fang
Affiliation:DONG Yong-qian,DI Xi-yuan,ZHANG Zhi-yao,TIAN Fang(The Second Research Institute of CETC,Taiyuan 030024,China)
Abstract:Design a high speed and precision motion platform according to particular demand of punching machine.Expound the concrete scheme and measurements from high stiffness mechanism,line motor and synchronization control,as well as Movement Error Compensation.Finally,the performance of the platform is validated with three methods.The platform can achieve very high acceleration and positioning accuracy,and get up to their design target.
Keywords:Motion platform  Linear motor  Position with high speed and precision  Synchronization control  
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