| 用于镀制超薄银膜的一种有效的监控方法 |
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| 引用本文： | 林炳,于天燕,张凤山.用于镀制超薄银膜的一种有效的监控方法[J].光学仪器,2005,27(1):82-85. |
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| 作者姓名： | 林炳 于天燕 张凤山 |
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| 作者单位： | 中国科学院上海技术物理研究所,上海,200083;中国科学院上海技术物理研究所,上海,200083;中国科学院上海技术物理研究所,上海,200083 |
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| 摘 要： | 银经常被应用于制备诱导增透滤光片,在这种宽带滤光片中,银膜的厚度一般在几个纳米,这样使得精确监控银的厚度很困难。提出一种简单易行的改进方法,通过在蒸发源上方加一个调速挡板,结合晶振膜厚仪,可以获得±0.4nm以内控制精度的超薄银膜。
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| 关 键 词： | 光学薄膜 超薄薄膜 薄膜技术 膜厚监控 |
| 文章编号： | 1005-5630(2005)01-0082-04 |
| 修稿时间： | 2004年6月14日 |
A simple improved method upon fabricating super-thin silver film |
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| LIN Bing,YU Tian-yan,ZHANG Feng-shan.A simple improved method upon fabricating super-thin silver film[J].Optical Instruments,2005,27(1):82-85. |
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| Authors: | LIN Bing YU Tian-yan ZHANG Feng-shan |
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| Abstract: | Silver is widely used in fabricating induced transmission filter, especially for broadband color separation filter. Only a few nanometer thickness of silver is induced into this film system, which makes consol very difficult. By introducing a simple improved method can resolve this problem. Adding a correction mask upon the evaporate source that can slow down the evaporate rate of silver, remaining high heating current, and combining with crystal thinkness measurement can limit the thickness error of silver film within ±0.4nm. |
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| Keywords: | optical film super-thin film thin film technique thinkness control |
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