| 检测计量光栅均匀性误差的探讨 |
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| 引用本文： | 杨进堂.检测计量光栅均匀性误差的探讨[J].光学精密工程,1996,4(2):109-113. |
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| 作者姓名： | 杨进堂 |
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| 作者单位： | 中国科学院长春光学精密机械研究所 |
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| 摘 要： | 叙述了统一计量光栅均匀性误差的检测方法.采用莫尔条纹对比度系数,将均匀性误差百分比表示转换成位移值表示.最后对影响均匀性误差的因素作了讨论.
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| 关 键 词： | 计量光栅 均匀性误差 莫尔条纹对比度 |
| 收稿时间： | 1995-10-25 |
Discussion on Homogeneity Error-calibrating of Metrelogy Gratings |
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| Yang Jintang.Discussion on Homogeneity Error-calibrating of Metrelogy Gratings[J].Optics and Precision Engineering,1996,4(2):109-113. |
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| Authors: | Yang Jintang |
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| Affiliation: | Changchun Intstitute of Optics &; Fine Mechanics, Chinese Academy of Soiences, Changchun 130022 |
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| Abstract: | A method on uniting calibration of homogeneity error of metrology gratings is describedin this paper,by means of the contrast coefficient of Moire fringe,the percent expression ofhomogeneity error is trans fored into displacement value expression. Finally,some factors ofaffecting homogeneeity error are discussed. |
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| Keywords: | Metrology gratings Homogeneity error Contrast of Moire fringe |
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