Preparation and characterization of indium oxide (In2O3) films by activated reactive evaporation

The electrical and optical properties of In₂O₃ films prepared at room temperature by activated reactive evaporation have been studied. Hall effect measurements at room temperature show that the films have a relatively high mobility 15 cm²v⁻¹s⁻¹, high carrier concentration 2·97 × 10²⁰/cm³, with a low resistivityρ = 1·35 × 10⁻³ ohm cm. As-prepared film is polycrystalline. It shows both direct and indirect allowed transitions with band gaps of 3·52eV and 2·94eV respectively.